Dektak 3 ST Surface Profiler - Measuring System
The Dektak3ST is a surface profiling system capable of measuring surface textures and variations in the submicro-inch range to a sample thickness of 131 microns. By way of a diamond-tipped stylus, samples are analyzed under it on a moving stage according to parameters set by the user (scan length and time). As the stylus traverses the pre-determined length of the sample surface, surface variations are recorded. The data recorded can then be analyzed (up to 30 functions per scan) depending on user interests. These parameter capabilities include: roughness, waviness, step height and geometry (area, radius, slope, etc.). The graphic screen display exhibits data plot and live video imaging.
Fig. 1: Profile of 46.250 KÂ NIST Certified Calibration Standard.
Table 1: Functions and Purpose
| R (reference) cursor | Software leveling, analytical functions |
| M (measurement) cursor | Software leveling, analytical functions |
| Vertical Delta | Vertical difference between which R and M cursors intercept profile trace |
| Horizontal Delta | Horizontal difference between two cursors |
Fig. 4: The user may choose analytical or geometric functions
of interest to be calculated into the scan.
Analytical functions
Fig. 4: The user may choose analytical or geometric functions of interest to be calculated into the scan.
